LED Micro exposure system

Microscope LED exposure system UTA series

<Introduction>

◎ Microscope LED exposure system UTA series, a projection exposure device that can              complete the exposure pattern without using a mask
◎ Metallographic microscope and LED light source DLP light machine can be used for              small-area pattern exposure with a few μm projection resolution on a photoresist-              coated substrate

◎ Patterns can be made freely using computer drawings
◎ In the atmospheric environment, forming electrodes on a variety of sizes, shapes, and        layered single crystal thin films is cheaper and more convenient than ordinary

    electron beam exposure machines. There is no need to make a pattern mask when              using it, which can greatly reduce research and development costs.

<Use Cases>
◎ Electrodes for forming thin-film FETs and holes
◎ Mo raw stone flakes, forming electrodes for rough stone characteristics evaluation

 
<Features>
◎ Exposure system using a combination of microscope and DLP can have a more                        competitive price than existing systems
◎ The software is easy to operate and can freely create exposure patterns
◎ Use objective magnification to achieve fine pattern and wide range of exposure。
◎ Can make micron-sized patterns