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Elli-SE Spectroscopic Ellipsometer

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Elli-SE  Spectroscopic Ellipsometer

 

High-performance film thickness measurement system, can measure up to 10 layers of film (depending on material properties), single layer thickness sub Å – 10mm (depending on material properties). Non-destructive, high resolution and short measurement time, suitable for semiconductor, OLED, polymer, solar, etc. related research and material thickness detection.

 

Collimating optic system

Rotating polarizer: Micro Stepping motor control
Collimating optic system
Rotating analyzer: Micro Stepping motor control
Wavelength range : 240 nm ~ 1,000 nm (CCD Type)
Resolution : 1.5 nm FWHM,
Manually variable angle of incidence
60˚~ 90˚ (5˚ Step)
Psi : Range, 0˚ ~ 90˚ Repeatability, ≤ ± 0.02˚
Delta : Range, 0˚ ~ 180˚ Repeatability, ≤ ± 0.10˚ with retarder Auto Collimator
6 inch (150 mm Circle type)

 

Application:

  1. Semiconductor : Si, Ge, ONO, ZnO, AZO, PR, poly-Si, GaN, GaAs, Si3N4
  2. Display(incl. OLED) : MgO, ITO, PR, NPB, Alq3 , CuPc, PVK, PAF, PEDT-PSS
  3. Dielectrics : SiO2, TiO2, Ta2O5, ITO, AIN, ZrO2, Si3N4, Ga2O3, Wet oxides
  4. Polymer : Dye, NPB, MNA, PVA, PET, TAC, PR
  5. Chemistry : Organic film(OLED) & LB Thin film
  6. Solar cell : SiN, a-Si, poly-Si, SiO2, Al2O3

 

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