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Elli-RSc

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Elli-RSc (Reflectometer)

 

High-speed film thickness measurement system, single-point measurement is completed within 1 second (depending on material properties). Up to 3 layers of film can be measured (depending on material properties), thickness range is 10nm-50mm (depending on material properties). Equipped with a microscope system, the size of the light spot can be adjusted, which is suitable for semiconductor, OLED, polymer, solar energy and other related research and material thickness detection.

 

System characteristics

  • Light source wavelength range: 450nm – 900nm
  • Beam spot size: 50mm、30mm、10mm
  • Measurement layers: up to 3 layers (depending on material properties)
  • Measuring thickness range : 10nm – 50mm (Varies by material properties)
  • Reproducibility: ± 1 Å
  • Carrier size: 140mm x 130mm
  • Can be installed with single-wavelength laser excitation light source

 

Application:

OPTION

  1. Thick film measurement system : thickness range 1.0 ~ 300 um (mFFT*)
  2. Beam spot size : 4.0 um
  3. Stage size : 200 x 200 mm^2, 300  x 300 mm^2 and others (ask for a customized stage size)
  4. Auto focusingsystem : Color CCD camera
  5. Anti-vibration table
  6. Transmittance module

 

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