Plasma reaction system
Femto Science
Surface Treatment Equipment
Exquisite design, a variety of cavity sizes and power to choose from, can be equipped with a quartz reaction tube, supports up to 6 groups of gas pipelines. Fully equipped with 7-inch touch panel, fully automatic system control
Cavity size: 140 × 200 × 110 (W × D × H, mm)
power: 100W, 20 – 100 KHz
Controller: 7-inch touch panel, automatic / manual control
Equipment size: 580 × 580 × 340 (W × D × H, mm)
Cavity size: 200 × 220 × 160 (W × D × H, mm)
power: 200W, 20 – 100 KHz
Controller: 7-inch touch panel, automatic / manual control
Equipment size: 618 × 630 × 460 (W × D × H, mm)
Cavity size: 330 × 350 × 250 (W × D × H, mm)
power: 300W, 20 – 100 KHz
Controller: 7-inch touch panel, automatic / manual control
Equipment size: 780 × 760 × 800 (W × D × H, mm)
Optional kit: Quartz tube (200 Dia. × 300 L, mm), RF generator (300W)
Cavity size: customized
power: highest 2000W, 20 – 100 KHz
Controller: 7-inch touch panel, automatic / manual control
Gas line: 最多6組
Optional kit: Quartz tube, RF generator