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Coating System
Coating System
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電漿反應系統
Femto Science
Coating System
水平式腔體: 203 Dia. × 440 L, mm
垂直式腔體: 300 Dia. × 400 L, mm
蒸發器溫度: 最高200˚ C
腔體溫度: 最高1000˚ C
控制器: 7吋觸控面板，自動/手動控制
設備尺寸: 1500 × 800 × 1180 (W × D × H, mm)
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